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Journal: Journal of Vacuum Science & Technology A [0734-2101]
Author: Kelly, M A
Year: 2001
Volume: 19
Page: 2127
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AIP Journals Complete
From 1983/01/01, volume 1
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Continues in part: Journal of Vacuum Science and Technology [0022-5355]
AIP Journals Complete
From 1964/09/01, volume 1
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