A flexible AMOLED display on the PEN substrate driven by oxide thin-film transistors using anodized aluminium oxide as dielectric

Abstract

We report a flexible AMOLED display driven by oxide thin film transistors (TFTs) with anodic AlO_x gate dielectric on a polyethylene naphthalate (PEN) substrate with a process temperature below 150 °C. The TFTs exhibit a field-effect mobility of 12.87 cm² V⁻¹ s⁻¹, a subthreshold swing of 0.20 V dec⁻¹, and an I_on/I_off ratio of 10⁹.