Jump to main content
Jump to site search

Issue 16, 2011
Previous Article Next Article

Facile fabrication of a rigid and chemically resistant micromixer system from photocurable inorganic polymer by static liquid photolithography (SLP)

Author affiliations

Abstract

Highly effective mixing in microchannels is important for most chemical reactions conducted in microfluidic chips. To obtain a rigid and chemically resistant micromixer system at low cost, we fabricated a Y-shaped microchannel with built-in mixer structures by static liquid photolithography (SLP) from methacrylated polyvinylsilazane (MPVSZ) as an inorganic polymer photoresist which was then converted to a silicate phase by hydrolysis in vaporized ammonia atmosphere at 80 °C. The microchannel incorporating herringbone mixer structures was bonded with a matching polydimethylsiloxane (PDMS) open channel which was pre-coated by perhydropolysilazane (PHPS)-based mixture, and finally treated by additional hydrolysis at room temperature to convert the PHPS layer to a silica phase. Finally, the chemical resistance of the microfluidic system with embedded micromixer was confirmed with various solvents, and the excellent mixing performance in a short mixing length of 2.3 cm was demonstrated by injecting two different colored fluids into the microchannel.

Graphical abstract: Facile fabrication of a rigid and chemically resistant micromixer system from photocurable inorganic polymer by static liquid photolithography (SLP)

Back to tab navigation

Supplementary files

Publication details

The article was received on 10 Feb 2011, accepted on 24 May 2011 and first published on 29 Jun 2011


Article type: Technical Note
DOI: 10.1039/C1LC20118B
Citation: Lab Chip, 2011,11, 2779-2784
  •   Request permissions

    Facile fabrication of a rigid and chemically resistant micromixer system from photocurable inorganic polymer by static liquid photolithography (SLP)

    Q. Fang, D. Kim, X. Li, T. Yoon and Y. Li, Lab Chip, 2011, 11, 2779
    DOI: 10.1039/C1LC20118B

Search articles by author

Spotlight

Advertisements