On-chip three dimensional microcoils for MRI at the microscale

Vlad Badilita; Kai Kratt; Nicoleta Baxan; Mohammad Mohmmadzadeh; Tobias Burger; Hans Weber; Dominik v. Elverfeldt; Jürgen Hennig; Jan G. Korvink; Ulrike Wallrabe

doi:10.1039/C000840K

On-chip three dimensional microcoils for MRI at the microscale

Vlad Badilita,*^a Kai Kratt,^a Nicoleta Baxan,^b Mohammad Mohmmadzadeh,^b Tobias Burger,^a Hans Weber,^b Dominik v. Elverfeldt,^b Jürgen Hennig,^b Jan G. Korvink^cd and Ulrike Wallrabe^ad

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^a University of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Microactuators, Georges-Köhler-Allee 102, Freiburg, Germany
E-mail: vlad.badilita@imtek.de
Fax: +49-761-203-7439
Tel: +49-761-203-7435

^b University Hospital Freiburg, Department of Diagnostic Radiology, Medical Physics, Hugstetterstr. 55, Freiburg, Germany

^c University of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Simulation, Georges-Köhler-Allee 103, Freiburg, Germany

^d University of Freiburg, Freiburg Institute of Advanced Studies (FRIAS), Albertstr. 19, Freiburg, Germany

Abstract

We present for the first time a fully MEMS-integrated technology to manufacture 3D geometrically perfect solenoidal microcoils for microscale MRI applications. We report 25 µm isotropic resolution MR images of a copper sulfate aqueous phantom. These images are acquired using microcoils with 5 windings of insulated 25 µm diameter Au wire and with quality factors as high as 46 at the operating frequency (400 MHz).

Lab on a Chip

On-chip three dimensional microcoils for MRI at the microscale

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On-chip three dimensional microcoils for MRI at the microscale

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