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Issue 14, 2010
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A study of the autofluorescence of parylene materials for μTAS applications

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Abstract

Parylene-C has been widely used as a biocompatible material for microfluidics and micro total analysis system (μTAS) applications in recent decades. However, its autofluorescence can be a major obstacle for parylene-C based devices used in applications requiring sensitive fluorescence detection. In this paper, Parylene-C was compared with other commonly used polymer and plastic materials in μTAS devices for their autofluorescence. We also report here an in-depth study of the behaviors and mechanisms of the autofluorescence of parylene-C, as well as several other commercialized members in the parylene family, including parylene-D, parylene-N and parylene-HT, using epifluorescence microscopy, fluorimeter and infrared spectroscopy. Strong autofluorescence was induced in parylene-C during short-wavelength excitation (i.e. UV excitation). Variation of autofluorescence intensity of parylene-C film was found to be related to both dehydrogenation and photo-oxidation. Moreover, the influence of microfabrication process on parylene-C autofluorescence was also evaluated. Parylene-HT, which exhibits low initial autofluorescence, decreasing autofluorescence behavior under UV excitation and higher UV stability, can be a promising alternative for μTAS applications with fluorescence detection.

Graphical abstract: A study of the autofluorescence of parylene materials for μTAS applications

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Publication details

The article was received on 27 Nov 2009, accepted on 19 Mar 2010 and first published on 29 Apr 2010


Article type: Paper
DOI: 10.1039/B924855B
Citation: Lab Chip, 2010,10, 1826-1834
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    A study of the autofluorescence of parylene materials for μTAS applications

    B. Lu, S. Zheng, B. Q. Quach and Y. Tai, Lab Chip, 2010, 10, 1826
    DOI: 10.1039/B924855B

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