Tantalum(V) diethylamide, [Ta(NEt2)5]: a potentially important and crystalline precursor for the CVD of oxides containing tantalum

Hywel O. Davies; Anthony C. Jones; Elizabeth A. McKinnell; James Raftery; Christopher A. Muryn; Mohammad Afzaal; Paul O'Brien

doi:10.1039/B602986H

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Tantalum(v) diethylamide, [Ta(NEt₂)₅]: a potentially important and crystalline precursor for the CVD of oxides containing tantalum

Hywel O. Davies,*^a Anthony C. Jones,^a Elizabeth A. McKinnell,^a James Raftery,^b Christopher A. Muryn,^b Mohammad Afzaal^b and Paul O'Brien^b

Author affiliations

* Corresponding authors

^a Epichem Limited Oxides and Nitrides, Power Road, Bromborough, Wirral, UK
E-mail: daviesh@epichem.co.uk
Fax: +44 151 334 6422
Tel: +44 151 334 2774

^b The Manchester Materials Science Centre and School of Chemistry, University of Manchester, Oxford Road, UK

Abstract

The homoleptic amide [Ta(NEt₂)₅] is regularly described in the CVD literature as being an unstable liquid. The compound in its pure form is a solid. The structure has been confirmed by single crystal X-ray diffraction and is shown to have a distorted trigonal bipyramidal structure with a Ta-N₅ core.

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Supplementary files

Crystal data TXT (37K)

Article information

DOI: https://doi.org/10.1039/B602986H
Article type: Communication
Submitted: 27 Feb 2006
Accepted: 16 May 2006
First published: 22 May 2006

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J. Mater. Chem., 2006,16, 2226-2228

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Tantalum(V) diethylamide, [Ta(NEt₂)₅]: a potentially important and crystalline precursor for the CVD of oxides containing tantalum

H. O. Davies, A. C. Jones, E. A. McKinnell, J. Raftery, C. A. Muryn, M. Afzaal and P. O'Brien, J. Mater. Chem., 2006, 16, 2226 DOI: 10.1039/B602986H

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Journal of Materials Chemistry