Growth control and characterization of vertically aligned IrO2 nanorods

Reui-San Chen; Ying-Sheng Huang; Ya-Min Liang; Dah-Shyang Tsai; Yun Chi; Ji-Jung Kai

doi:10.1039/B305602N

Growth control and characterization of vertically aligned IrO₂nanorods

Reui-San Chen,^a Ying-Sheng Huang,*^a Ya-Min Liang,^b Dah-Shyang Tsai,^b Yun Chi^c and Ji-Jung Kai^d

* Corresponding authors

^a Department of Electronic Engineering, National Taiwan University of Science and Technology, 43 Keelung Road, Taipei 106, Taiwan, Republic of China

^b Department of Chemical Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan, Republic of China
E-mail: ysh@et.ntust.edu.tw

^c Department of Chemistry, National Tsing Hua University, Hsinchu 300, Taiwan, Republic of China

^d Department of Engineering and System Science, National Tsing Hua University, Hsinchu 300, Taiwan, Republic of China

Abstract

Iridium dioxide (IrO₂) nanorods with pointed tips have been grown on Si(100) and transition-metal-coated-Si(100) substrates, via metal–organic chemical vapor deposition (MOCVD), using (MeCp)Ir(COD) as the source reagent. The as-deposited nanorods were characterized using field-emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). FESEM micrographs revealed that the majority of the nanorods are a wedge shape in cross section and converge at top; occasionally several of them pack into a column of a spiral tip. The vertical alignment and packing density are significantly improved by prior deposition of a thin layer of Ti on Si. TEM and XRD results indicate that the sputtered Ti thin layer erects the nanorods in the c-axis direction. XPS spectra show that iridium in IrO₂ nanorods also exist in a higher oxidation state.

Article information

https://doi.org/10.1039/B305602N

Article type

Paper

Submitted

19 May 2003

Accepted

29 Jul 2003

First published

13 Aug 2003

Download Citation

J. Mater. Chem., 2003,13, 2525-2529

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Growth control and characterization of vertically aligned IrO₂ nanorods

R. Chen, Y. Huang, Y. Liang, D. Tsai, Y. Chi and J. Kai, J. Mater. Chem., 2003, 13, 2525 DOI: 10.1039/B305602N

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Journal of Materials Chemistry