SCHEDULED MAINTENANCE
Electrostatic spray deposition (ESD) is a technique recently developed for the fabrication of inorganic thin films. Several process steps involved in an ESD process are overviewed. A variety of surface morphologies of LiCoO2 thin layers fabricated by this technique are presented, indicating correlations between the morphologies and deposition conditions.
C. Chen, E. M. Kelder, P. J. J. M. van der Put and J. Schoonman, J. Mater. Chem., 1996, 6, 765 DOI: 10.1039/JM9960600765
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