Chemomechanical polishing of lithium niobate using alkaline silica sol and alkaline silica sol modified with hydrogendifluoride anion

Abstract

Lithium niobate undergoes a slow reaction with anhydrous HF at room temperature to give LiNbOF₄, which is readily hydrolysed to give Nb₂O₅ as one product. This sequence of reactions is believed to be responsible for the superior performance of aqueous alkaline silica sol modified by the addition of [HF₂]^– for the Chemomechanical polishing of LiNbO₃ wafers, compared with silica sol alone.