Issue 17, 2001

Positive and negative photopatterning of metal oxides on silicon via bipolar electrochemical depositionElectronic supplementary information (ESI) available: experimental details, XRD profiles, optical and SEM micrographs. See http://www.rsc.org/suppdata/cc/b1/b104586p/

Abstract

Negative and positive microscale patterning of metal oxides is efficiently and rapidly carried out on flat Si(100) surfaces via a simple white light assisted bipolar electrochemical process.

Supplementary files

Article information

Article type
Communication
Submitted
24 May 2001
Accepted
13 Jul 2001
First published
09 Aug 2001

Chem. Commun., 2001, 1614-1615

Positive and negative photopatterning of metal oxides on silicon via bipolar electrochemical deposition

H. C. Choi and J. M. Buriak, Chem. Commun., 2001, 1614 DOI: 10.1039/B104586P

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