An in situ gas chromatographic and mass spectrometric investigation of the role of substrate temperature in the production of zinc selenide from dimethylzinc and hydrogen selenide via metal–organic vapour phase epitaxy (MOVPE)

Abstract

Anomalous temperature-dependent decomposition of dimethylzinc, and its reaction with hydrogen selenide under MOVPE (metal–organic vapour phase epitaxy) growth conditions have been monitored by g.c. and mass spectrometry and the results correlated with optimum growth of zinc selenide epitaxial layers on single crystalline GaAs substrates.