Issue 1, 2014

A simple and inexpensive technique for PDMS/silicon chip alignment with sub-μm precision

Abstract

This paper describes a novel simple and inexpensive assembly technique with highly accurate alignment of a polydimethylsiloxane (PDMS) layer on a silicon chip for hybrid microfluidic/electronic applications. It is based on strong electrostatic adhesion of a 200 μm thick and dense layer of PDMS onto a metallic cylindrical tool mechanically fixed to an optical microscope. A 2 mm hole in the tool allows precise alignment of the PDMS layer, 10 μm from the surface, without the usage of any lubricant. The same tool is used for PDMS bonding in a well-controlled manner. This technique is compatible with wafer scale alignment. A very precise consideration of the PDMS shrinkage ratio, reduced by 50% for thin layers, enables a misalignment range of less than 1 μm in the experiments.

Graphical abstract: A simple and inexpensive technique for PDMS/silicon chip alignment with sub-μm precision

Article information

Article type
Paper
Submitted
17 Sep 2013
Accepted
20 Sep 2013
First published
24 Sep 2013

Anal. Methods, 2014,6, 97-101

A simple and inexpensive technique for PDMS/silicon chip alignment with sub-μm precision

R. Sivakumarasamy, K. Nishiguchi, A. Fujiwara, D. Vuillaume and N. Clément, Anal. Methods, 2014, 6, 97 DOI: 10.1039/C3AY41618F

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements