The effect of the experimental parameters on the growth of MoS2 flakes

Abstract

Chemical vapor deposition (CVD) is one of the successful methods to synthesize two-dimensional (2D) graphene-like transition metal dichalcogenides (TMDCs) with different morphologies, large size, and high crystal quality, which are beneficial for fundamental research and applications. However, the controllable growth of a 2D molybdenum sulfide (MoS₂) monolayer with larger size and high quality is still the challenging issue. In this study, a triangular MoS₂ monolayer with a different size and quality has been synthesized under different experimental conditions, including growth temperature, growth time, and precursor weight, by an atmospheric-pressure CVD method. The detailed morphology, size, layer number and optical properties of the as-grown MoS₂ flakes have been examined by optical microscopy, X-ray photoelectron spectroscopy, atomic force microscopy, Raman and photoluminescence spectroscopy. The evolution of size and optical performance of the triangular MoS₂ flakes has been systematically investigated in terms of the growth parameters.