Jump to main content
Jump to site search

Issue 61, 2015
Previous Article Next Article

Nanochannel arrays etched into hexagonal boron nitride meso-membranes by a focused ion beam

Author affiliations

Abstract

Meso-membranes with highly ordered nanochannel arrays have been fabricated by patterning hexagonal boron nitride (h-BN) films using a focused ion beam. The complete experimental procedure is given in detail from the chemical vapor deposition for h-BN synthesis to its patterning and the final membrane design for nanofluidic experiments. The membranes obtained are characterized at each experimental step by electron microscopy and Raman spectroscopy. The technique is finally applied to fabricate devices in which the only passage for a fluid is a nanochannel array etched into a h-BN film.

Graphical abstract: Nanochannel arrays etched into hexagonal boron nitride meso-membranes by a focused ion beam

Back to tab navigation

Supplementary files

Publication details

The article was received on 25 Mar 2015, accepted on 14 May 2015 and first published on 14 May 2015


Article type: Communication
DOI: 10.1039/C5RA05325K
Author version available: Download Author version (PDF)
Citation: RSC Adv., 2015,5, 49231-49234
  •   Request permissions

    Nanochannel arrays etched into hexagonal boron nitride meso-membranes by a focused ion beam

    S. Linas, R. Fulcrand, F. Cauwet, B. Poinsot and A. Brioude, RSC Adv., 2015, 5, 49231
    DOI: 10.1039/C5RA05325K

Search articles by author

Spotlight

Advertisements