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Issue 35, 2015
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Buckled diamond-like carbon nanomechanical resonators

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Abstract

We have developed capacitively-transduced nanomechanical resonators using sp2-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a temperature of 500 °C. Characterizing the resonant response, we find a larger than expected frequency tuning that we attribute to the membrane being buckled upwards, away from the bottom electrode. The possibility of using buckled resonators to increase frequency tuning can be of advantage in rf applications such as tunable GHz filters and voltage-controlled oscillators.

Graphical abstract: Buckled diamond-like carbon nanomechanical resonators

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Publication details

The article was received on 30 Apr 2015, accepted on 04 Aug 2015 and first published on 13 Aug 2015


Article type: Paper
DOI: 10.1039/C5NR02820E
Author version available: Download Author version (PDF)
Citation: Nanoscale, 2015,7, 14747-14751
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    Buckled diamond-like carbon nanomechanical resonators

    M. Tomi, A. Isacsson, M. Oksanen, D. Lyashenko, J. Kaikkonen, S. Tervakangas, J. Kolehmainen and P. J. Hakonen, Nanoscale, 2015, 7, 14747
    DOI: 10.1039/C5NR02820E

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