Jump to main content
Jump to site search

Issue 4, 2015
Previous Article Next Article

Fabrication of high-performance, low-temperature solution processed amorphous indium oxide thin-film transistors using a volatile nitrate precursor

Author affiliations

Abstract

In this study, we fabricate amorphous indium oxide thin film transistors (TFTs) on a display glass substrate at various annealing temperatures from 200 °C to 300 °C. Using a volatile nitrate precursor, we were able to fabricate TFTs with excellent device performance within this annealing temperature range. Amorphous In2O3 films could be obtained by carefully controlling the film thickness and annealing temperature. TFTs based on amorphous In2O3 channel layers with an average mobility as high as 7.5 cm2 V−1 s−1, an Ion/Ioff ratio of 107, and Von = −5 V could be fabricated at 300 °C annealing temperature in air. The devices prepared at 200 °C still exhibit transistor characteristics with an average mobility of 0.04 cm2 V−1 s−1, an Ion/Ioff ratio of 105, and Von = 0 V. The temperature effects on the device performances are elucidated based on X-ray photoelectron spectroscopy and thermal gravimetric analysis characterization results of precursors and the resulting amorphous In2O3 thin films.

Graphical abstract: Fabrication of high-performance, low-temperature solution processed amorphous indium oxide thin-film transistors using a volatile nitrate precursor

Back to tab navigation

Publication details

The article was received on 17 Jul 2014, accepted on 16 Nov 2014 and first published on 20 Nov 2014


Article type: Paper
DOI: 10.1039/C4TC01568A
Author version available: Download Author version (PDF)
Citation: J. Mater. Chem. C, 2015,3, 854-860
  •   Request permissions

    Fabrication of high-performance, low-temperature solution processed amorphous indium oxide thin-film transistors using a volatile nitrate precursor

    C. Choi, S. Han, Y. Su, Z. Fang, L. Lin, C. Cheng and C. Chang, J. Mater. Chem. C, 2015, 3, 854
    DOI: 10.1039/C4TC01568A

Search articles by author

Spotlight

Advertisements