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Issue 24, 2014
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Partially fluorinated oxo-alkoxide tungsten(VI) complexes as precursors for deposition of WOx nanomaterials

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Abstract

The partially fluorinated oxo-alkoxide tungsten(VI) complexes WO(OR)4 [4; R = C(CH3)2CF3, 5; R = C(CH3)(CF3)2] have been synthesized as precursors for chemical vapour deposition (CVD) of WOx nanocrystalline material. Complexes 4 and 5 were prepared by salt metathesis between sodium salts of the fluoroalkoxides and WOCl4. Crystallographic structure analysis allows comparison of the bonding in 4 and 5 as the fluorine content of the fluoroalkoxide ligands is varied. Screening of 5 as a CVD precursor by mass spectrometry and thermogravimetric analysis was followed by deposition of WOx nanorods.

Graphical abstract: Partially fluorinated oxo-alkoxide tungsten(vi) complexes as precursors for deposition of WOx nanomaterials

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Publication details

The article was received on 07 Feb 2014, accepted on 29 Apr 2014 and first published on 30 Apr 2014


Article type: Paper
DOI: 10.1039/C4DT00407H
Author version available: Download Author version (PDF)
Citation: Dalton Trans., 2014,43, 9226-9233
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    Partially fluorinated oxo-alkoxide tungsten(VI) complexes as precursors for deposition of WOx nanomaterials

    R. O. Bonsu, H. Kim, C. O'Donohue, R. Y. Korotkov, K. R. McClain, K. A. Abboud, A. A. Ellsworth, A. V. Walker, T. J. Anderson and L. McElwee-White, Dalton Trans., 2014, 43, 9226
    DOI: 10.1039/C4DT00407H

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