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Issue 39, 2013
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TiO2-based transparent conducting oxides; the search for optimum electrical conductivity using a combinatorial approach

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Abstract

A series of Nb, W, N and F:TiO2 thin-film systems were grown by a combinatorial atmospheric pressure chemical vapour deposition (APCVD) process. Conditions were varied in each experiment to produce a series of films with compositional gradient. For each system, the electrical resistivity at a number of positions (up to 200 on each film) was screened using a high-throughput tool. This allowed easy identification of the material with the lowest electrical resistivity across a reservoir of combinatorially produced samples. The most conductive material within each system was analysed in depth by X-ray photoelectron spectroscopy, wavelength dispersive X-ray analysis, X-ray diffraction, Raman spectroscopy, scanning electron microscopy, UV-visible-NIR spectroscopy and Hall effect measurements. The most electrically conductive materials are found in the F:TiO2 [Fs ≈ 4–5%, ρ = 0.21 Ω cm, μ = 3.6 cm2 V−1 s−1, n = 8.1 × 1018 cm−3] and Nb:TiO2 [Nb = 0.07 ± 0.03%, ρ = 0.22 Ω cm, μ = 3.4 cm2 V−1 s−1, n = 8.3 × 1018 cm−3] systems. The electrical resistivities reported for Nb:TiO2 and W:TiO2 are the best to date for materials grown by APCVD. Extensive comparisons with the literature are made and summarised in this report.

Graphical abstract: TiO2-based transparent conducting oxides; the search for optimum electrical conductivity using a combinatorial approach

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Publication details

The article was received on 29 Jul 2013, accepted on 02 Aug 2013 and first published on 05 Aug 2013


Article type: Paper
DOI: 10.1039/C3TC31472C
Citation: J. Mater. Chem. C, 2013,1, 6335-6346
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    TiO2-based transparent conducting oxides; the search for optimum electrical conductivity using a combinatorial approach

    A. Kafizas, N. Noor, C. J. Carmalt and I. P. Parkin, J. Mater. Chem. C, 2013, 1, 6335
    DOI: 10.1039/C3TC31472C

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