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Fabrication of complex 3-dimensional patterned structures on a [similar]10 nm scale from a single master pattern by secondary sputtering lithography

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Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Korea
E-mail: heetae@kaist.ac.kr;
Fax: +82-42-350-3910 ;
Tel: +82-42-350-3931
Nanoscale, 2013,5, 2358-2363

DOI: 10.1039/C3NR33739A
Received 20 Nov 2012, Accepted 14 Jan 2013
First published online 17 Jan 2013
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