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Issue 21, 2013
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Biomimetic artificial Si compound eye surface structures with broadband and wide-angle antireflection properties for Si-based optoelectronic applications

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Abstract

We report the biomimetic artificial silicon (Si) compound eye structures for broadband and wide-angle antireflection by integrating nanostructures (NSs) into periodically patterned microstructures (p-MSs) via thermal dewetting of gold and subsequent dry etching. The truncated cone microstructures with a two-dimensional hexagonal symmetry pattern were fabricated by photolithography and dry etching processes. The desirable shape and density of the nanostructures were obtained by controlled dewetting. The incorporation of p-MSs into the NS/Si surface further reduced the surface total reflectance over a wide wavelength range of 300–1030 nm at near normal incidence, indicating the average reflectance (Ravg) and solar weighted reflectance (RSWR) values of ∼2.5% and 2%, respectively, compared to the only NSs on the flat Si surface (i.e., Ravg ∼ 4.9% and RSWR ∼ 4.5%). Additionally, the resulting structure improved the angle-dependent antireflection property due to its relatively omnidirectional shape, which exhibited the Ravg < 4.3% and RSWR < 3.7% in the wavelength region of 300–1100 nm even at a high incident light angle of 70° in the specular reflectance.

Graphical abstract: Biomimetic artificial Si compound eye surface structures with broadband and wide-angle antireflection properties for Si-based optoelectronic applications

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Publication details

The article was received on 30 May 2013, accepted on 19 Aug 2013 and first published on 27 Aug 2013


Article type: Paper
DOI: 10.1039/C3NR02806B
Citation: Nanoscale, 2013,5, 10455-10460
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    Biomimetic artificial Si compound eye surface structures with broadband and wide-angle antireflection properties for Si-based optoelectronic applications

    J. W. Leem, Y. M. Song and J. S. Yu, Nanoscale, 2013, 5, 10455
    DOI: 10.1039/C3NR02806B

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