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Issue 1, 2013
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Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum

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Abstract

We introduce a laser assisted electron beam induced deposition (LAEBID) process which is a nanoscale direct write synthesis method that integrates an electron beam induced deposition process with a synchronized pulsed laser step to induce thermal desorption of reaction by-products. Localized, spatially overlapping electron and photon pulses enable the thermal desorption of the reaction by-product while mitigating issues associated with bulk substrate heating, which can shorten the precursor residence time and distort pattern fidelity due to thermal drift. Current results demonstrate purification of platinum deposits (reduced carbon content by ∼50%) with the addition of synchronized laser pulses as well as a significant reduction in deposit resistivity. Measured resistivities from platinum LAEBID structures (4 × 103 μΩ cm) are nearly 4 orders of magnitude lower than standard EBID platinum structures (2.2 × 107 μΩ cm) from the same precursor and are lower than the lowest reported EBID platinum resistivity with post-deposition annealing (1.4 × 104 μΩ cm). Finally the LAEBID process demonstrates improved deposit resolution by ∼25% compared to EBID structures under the conditions investigated in this work.

Graphical abstract: Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum

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Publication details

The article was received on 02 Oct 2012, accepted on 12 Nov 2012 and first published on 13 Nov 2012


Article type: Paper
DOI: 10.1039/C2NR33014H
Citation: Nanoscale, 2013,5, 408-415
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    Enhanced material purity and resolution via synchronized laser assisted electron beam induced deposition of platinum

    N. A. Roberts, J. D. Fowlkes, G. A. Magel and P. D. Rack, Nanoscale, 2013, 5, 408
    DOI: 10.1039/C2NR33014H

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