Electrochemical Mechanical Micromachining Based On Confined Etchant Layer Technique

Ye Yuan; Lianhuan Han; Jie Zhang; Jingchun Jia; Xuesen Zhao; Yongzhi Cao; Zhenjiang Hu; Yongda Yan; Shen Dong; Zhong-qun Tian; Zhaowu Tian; Dongping Zhan

doi:10.1039/C3FD00008G

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Electrochemical Mechanical Micromachining Based On Confined Etchant Layer Technique

Ye Yuan, Lianhuan Han, Jie Zhang, Jingchun Jia, Xuesen Zhao, Yongzhi Cao, Zhenjiang Hu, Yongda Yan, Shen Dong, Zhong-qun Tian, Zhaowu Tian and Dongping Zhan

Faraday Discuss., 2013, Accepted Manuscript

DOI: 10.1039/C3FD00008G
Received 01 Feb 2013, Accepted 13 Feb 2013
First published online 13 Feb 2013

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Confined etchant layer technique (CELT) has been proved an effective electrochemical microfabrication method since its first publication on Faraday Discussion in 1992. Recently, we develop CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically-induced chemical etching processes and the mechanical motions, ECMM can also obtained regular surface in one step. Taking the advantages of CELT, the machining tolerance and the surface roughness can reach to micro- or nano-meter scale.

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