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ALD/MLD of novel layer-engineered Zn-based inorganic–organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor

Anjali Sood,a   Pia Sundberga and   Maarit Karppinen*a  
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Laboratory of Inorganic Chemistry, Department of Chemistry, Aalto University, P.O. Box 16100, FI-00076 AALTO, Finland
E-mail: maarit.karppinen@aalto.fi;
Fax: +358 9 462 373 ;
Tel: +358 9 50 384 1726
Dalton Trans., 2013,42, 3869-3875

DOI: 10.1039/C2DT32630B
Received 03 Nov 2012, Accepted 21 Dec 2012
First published online 21 Dec 2012
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