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Rapid nanopatterning of zirconium dioxide via nanoprinting and microwave-assisted annealing

Dae-Geun Choi,*ab   Ki-Joong Lee,a   Sarah Kim,a   Eung-Sug Lee,a   Jun-Ho Jeong,a   Jihye Leea and   Jun-Hyuk Choia  
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Nanomechanical System Research Division, Korea Institute of Machinery and Materials, 171 Jang-dong Yuseong-gu, Daejeon, Republic of Korea
Department of Nano-Mechatronics, University of Science and Technology, 217 Gajungro Yuseong-gu, Daejeon, Republic of Korea
RSC Adv., 2012,2, 11035-11039

DOI: 10.1039/C2RA21919K
Received 24 Aug 2012, Accepted 11 Sep 2012
First published online 14 Sep 2012
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