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Paper

Rapid fabrication and piezoelectric tuning of micro- and nanopores in single crystal quartz

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Corresponding authors
a
Department of Electrical and Computer Engineering, University of Wisconsin-Madison, 1415 Engineering Drive, Madison, USA
E-mail: estava@wisc.edu
b
Institut für Angewandte Physik und Zentrum für Mikrostrukturforschung, Universität Hamburg, Jungiusstraße 11, Germany ;
Fax: +49 40-428-38-6332 ;
Tel: +49 40-42838-2910
c
Materials Science Program, University of Wisconsin-Madison, 1415 Engineering Drive, Madison, USA
Lab Chip, 2013,13, 156-160

DOI: 10.1039/C2LC40925A
Received 14 Aug 2012, Accepted 22 Oct 2012
First published online 24 Oct 2012
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