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Issue 13, 2012
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Superelastic metal microsprings as fluidic sensors and actuators

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Abstract

Superelastic metal microsprings fabricated by deterministic rolling of nanomembranes have been anisotropic-strain-engineered via glancing angle deposition. The advantageous applications of metal microsprings in liquid flow rate sensors and chemical-stimulated actuators due to their reliable superelasticity are demonstrated. Theoretical calculation of microspring elongation as a function of flow rate agrees with our experimental observation and reveals that the sensitivity can be well tuned by the geometrical design of the microsprings. Such outstanding mechanical properties of rolled-up metal microsprings should find important applications in future fluidic micro-/nano-devices.

Graphical abstract: Superelastic metal microsprings as fluidic sensors and actuators

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Publication details

The article was received on 12 Feb 2012, accepted on 13 Mar 2012 and first published on 20 Mar 2012


Article type: Paper
DOI: 10.1039/C2LC40151G
Citation: Lab Chip, 2012,12, 2322-2328
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    Superelastic metal microsprings as fluidic sensors and actuators

    W. Li, G. Huang, J. Wang, Y. Yu, X. Wu, X. Cui and Y. Mei, Lab Chip, 2012, 12, 2322
    DOI: 10.1039/C2LC40151G

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