a
Laboratory for Bio- and Nano-Photonics, Department of Microsystems Engineering – IMTEK, University of Freiburg, Georges-Köhler-Allee, Germany
E-mail: rohrbach@imtek.uni-freiburg.de
b
Centre for Biological Signalling Studies (bioss), University of Freiburg, Germany
c
HSG-IMIT, Wilhelm-Schickard-Str. 10,, Villingen-Schwenningen, Germany
d
Laboratory for MEMS-Applications, Department of Microsystems Engineering – IMTEK, University of Freiburg, Germany