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Issue 17, 2012
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Rhodium pyrazolate complexes as potential CVD precursors

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Abstract

Reaction of 3,5-(CF3)2PzLi with [Rh(μ-Cl)(η2-C2H4)2]2 or [Rh(μ-Cl)(PMe3)2]2 in Et2O gave the dinuclear complexes [Rh(η2-C2H4)2(μ-3,5-(CF3)2-Pz)]2 (1) and [Rh2(μ-Cl)(μ-3,5-(CF3)2-Pz) (PMe3)4] (2) respectively (3,5-(CF3)2Pz = bis-trifluoromethyl pyrazolate). Reaction of PMe3 with [Rh(COD)(μ-3,5-(CF3)2-Pz)]2 in toluene gave [Rh(3,5-(CF3)2-Pz)(PMe3)3] (3). Reaction of 1 and 3 in toluene (1 : 4) gave moderate yields of the dinuclear complex [Rh(PMe3)2(μ-3,5-(CF3)2-Pz)]2 (4). Reaction of 3,5-(CF3)2PzLi with [Rh(PMe3)4]Cl in Et2O gave the ionic complex [Rh(PMe3)4][3,5-(CF3)2-Pz] (5). Two of the complexes, 1 and 3, were studied for use as CVD precursors. Polycrystalline thin films of rhodium (fcc-Rh) and metastable–amorphous films of rhodium phosphide (Rh2P) were grown from 1 and 3 respectively at 170 and 130 °C, 0.3 mmHg in a hot wall reactor using Ar as the carrier gas (5 cc min−1). Thin films of amorphous rhodium and rhodium phosphide (Rh2P) were grown from 1 and 3 at 170 and 130 °C respectively at 0.3 mmHg in a hot wall reactor using H2 as the carrier gas (7 cc min−1).

Graphical abstract: Rhodium pyrazolate complexes as potential CVD precursors

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Publication details

The article was received on 20 Dec 2011, accepted on 09 Feb 2012 and first published on 13 Feb 2012


Article type: Paper
DOI: 10.1039/C2DT12450E
Citation: Dalton Trans., 2012,41, 5401-5408
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    Rhodium pyrazolate complexes as potential CVD precursors

    J. H. Rivers, L. J. DePue Anderson, C. M. N. Starr and R. A. Jones, Dalton Trans., 2012, 41, 5401
    DOI: 10.1039/C2DT12450E

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