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Issue 1, 2012
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Dinuclear Rh(II) pyrazolates as CVD precursors for rhodium thin films

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Abstract

New dinuclear rhodium(II) pyrazolate (Pz) complexes of formula Rh2(3-R,5-R′Pz)4·2L (R = R′ = CF3, L = H2O (1), CH3CN (2)) and Rh2(3-R,5-R′Pz)4 (R = R′ = tBu (3); R = CF3, R′ = tBu (4)) have been synthesized from the interaction of the lithium salt of the corresponding pyrazole with Rh2(OAc)4 in diethyl ether. The complexes were characterized by X-ray crystallography and spectroscopic methods. They were further evaluated as precursors for the chemical vapor deposition (CVD) of Rh thin films using H2 as the carrier gas. The resulting films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS).

Graphical abstract: Dinuclear Rh(ii) pyrazolates as CVD precursors for rhodium thin films

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Publication details

The article was received on 31 Aug 2011, accepted on 08 Oct 2011 and first published on 08 Nov 2011


Article type: Paper
DOI: 10.1039/C1DT11649E
Citation: Dalton Trans., 2012,41, 173-179
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    Dinuclear Rh(II) pyrazolates as CVD precursors for rhodium thin films

    W. J. McCarty, X. Yang, L. J. D. Anderson and R. A. Jones, Dalton Trans., 2012, 41, 173
    DOI: 10.1039/C1DT11649E

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