a
Program in Nano Science and Technology, Graduate School of Convergence Science and Technology, Seoul National University, Seoul, Republic of Korea
E-mail: younskim@snu.ac.kr
b
DRAM Process Architecture Team, Memory Division, Semiconductor Business, Samsung Electronics Co, Ltd, Banwol-Dong, Hwasung-si, Republic of Korea
c
Department of Chemical and Biological Engineering, Korea University, Seoul, Republic of Korea
E-mail: jinhan71@korea.ac.kr
d
Advanced Institutes of Convergence Technology, Iui-dong 864-1, Yeongtong-gu, Suwon-si, Republic of Korea