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A high impact peer reviewed journal publishing experimental and theoretical work across the breadth of nanoscience and nanotechnology
Impact Factor 7.76 48 Issues per Year
Feature Article

Lithography, metrology and nanomanufacturing

Corresponding authors
Center for Nanoscale Science & Technology, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, USA
Fax: +1 301 975 5314
Tel: +1 301 975 6050
Nanoscale, 2011,3, 2679-2688

DOI: 10.1039/C1NR10046G
Received 14 Jan 2011, Accepted 21 Feb 2011
First published online 12 Apr 2011

This article is part of themed collection: Lithography
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