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Feature Article

Lithography, metrology and nanomanufacturing

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Center for Nanoscale Science & Technology, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, USA
E-mail: liddle@nist.gov;
Fax: +1 301 975 5314 ;
Tel: +1 301 975 6050
Nanoscale, 2011,3, 2679-2688

DOI: 10.1039/C1NR10046G
Received 14 Jan 2011, Accepted 21 Feb 2011
First published online 12 Apr 2011

This article is part of themed collection: Lithography
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