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Issue 11, 2011
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Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography

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Abstract

Nano-in-micro-patterned heterogeneous substrates and Pt electrodes are prepared via organic/inorganic self-assembly combined with deep X-ray lithography. Nanoperforated titania membranes are obtained through dip coating from a sol–gel solution using block copolymer micelles as templating agent. Such thin films are selectively exposed to the X-ray radiation that leads to the structural local densification and permits the selective etching of the unexposed layer. Structural as well as electrochemical characterizations demonstrate that the final materials are micrometric features of a sub-10 nm thick perforated titania membrane that guarantees the accessibility to the substrate. This system was also applied to a conductive platinum-coated silicon surface to achieve micrometric features of nanoelectrode arrays. This scalable strategy of combining bottom-up and top-down approaches is thereby promising for various applications involving smart functional devices.

Graphical abstract: Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography

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Publication details

The article was received on 15 Oct 2010, accepted on 14 Dec 2010 and first published on 27 Jan 2011


Article type: Paper
DOI: 10.1039/C0JM03493B
Citation: J. Mater. Chem., 2011,21, 3597-3603
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    Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography

    M. Faustini, B. Marmiroli, L. Malfatti, B. Louis, N. Krins, P. Falcaro, G. Grenci, C. Laberty-Robert, H. Amenitsch, P. Innocenzi and D. Grosso, J. Mater. Chem., 2011, 21, 3597
    DOI: 10.1039/C0JM03493B

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