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Titanium arsenide films from the atmospheric pressure chemical vapour deposition of tetrakisdimethylamidotitanium and tert-butylarsine

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Materials Chemistry Centre, Department of Chemistry, University College London, Gordon St., London, England
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Dalton Trans., 2011,40, 10664-10669

DOI: 10.1039/C1DT10457H
Received 17 Mar 2011, Accepted 09 Jun 2011
First published online 08 Jul 2011

This article is part of themed collection: Dalton Transactions 40th Anniversary
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