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Critical Review

High-frequency nanofluidics: a universal formulation of the fluid dynamics of MEMS and NEMS

Corresponding authors
Mechanical Engineering Department, Boston University, Boston, USA
Center for Nanoscale Science and Technology, NIST, Gaithersburg, USA
Department of Chemical Engineering, Princeton University, Princeton, USA
Holst Centre/IMEC, High Tech Campus 31, Eindhoven, The Netherlands
Lab Chip, 2010,10, 3013-3025

DOI: 10.1039/C003770M
Received 01 Mar 2010, Accepted 27 Jul 2010
First published online 23 Sep 2010
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