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Critical Review

High-frequency nanofluidics: a universal formulation of the fluid dynamics of MEMS and NEMS

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Corresponding authors
a
Mechanical Engineering Department, Boston University, Boston, USA
E-mail: ekinci@bu.edu
b
Center for Nanoscale Science and Technology, NIST, Gaithersburg, USA
c
Department of Chemical Engineering, Princeton University, Princeton, USA
d
Holst Centre/IMEC, High Tech Campus 31, Eindhoven, The Netherlands
Lab Chip, 2010,10, 3013-3025

DOI: 10.1039/C003770M
Received 01 Mar 2010, Accepted 27 Jul 2010
First published online 23 Sep 2010
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