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Issue 22, 2010
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High-frequency nanofluidics: a universal formulation of the fluid dynamics of MEMS and NEMS

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Abstract

A solid body undergoing oscillatory motion in a fluid generates an oscillating flow. Oscillating flows in Newtonian fluids were first treated by G.G. Stokes in 1851. Since then, this problem has attracted much attention, mostly due to its technological significance. Recent advances in micro- and nanotechnology require that this problem be revisited: miniaturized mechanical resonators with linear dimensions in microns and sub-microns—microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), respectively—give rise to oscillating flows when operated in fluids. Yet flow parameters for these devices, such as the characteristic flow time and length scales, may deviate greatly from those in Stokes' solution. As a result, new and interesting physics emerges with important consequences to device applications. In this review, we shall provide an introduction to this area of fluid dynamics, called high-frequency nanofluidics, with emphasis on both theory and experiments.

Graphical abstract: High-frequency nanofluidics: a universal formulation of the fluid dynamics of MEMS and NEMS

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Publication details

The article was received on 01 Mar 2010, accepted on 27 Jul 2010 and first published on 23 Sep 2010


Article type: Critical Review
DOI: 10.1039/C003770M
Citation: Lab Chip, 2010,10, 3013-3025
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    High-frequency nanofluidics: a universal formulation of the fluid dynamics of MEMS and NEMS

    K. L. Ekinci, V. Yakhot, S. Rajauria, C. Colosqui and D. M. Karabacak, Lab Chip, 2010, 10, 3013
    DOI: 10.1039/C003770M

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