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Laminar flow used as “liquid etch mask” in wet chemical etching to generate glass microstructures with an improved aspect ratio

Xuan Mu,ab   Qionglin Liang,*b   Ping Hu,c   Kangning Ren,b   Yiming Wangb and   Guoan Luo*ab  
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Corresponding authors
a
School of Pharmacy, East China University of Science and Technology, Shanghai, P. R. China
E-mail: Luoga@tsinghua.edu.cn, Liangql@tsinghua.edu.cn
b
Key Laboratory of Bioorganic Phosphorus Chemistry & Chemical Biology (Ministry of Education), Department of Chemistry, Tsinghua University, Beijing, P. R. China
c
College of Chemical and Molecular Engineering, East China University of Science and Technology, Shanghai, P. R. China
Lab Chip, 2009,9, 1994-1996

DOI: 10.1039/B904769G
Received 09 Mar 2009, Accepted 18 May 2009
First published online 26 May 2009
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