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Issue 16, 2009
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Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices

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Abstract

Microfluidic researches are now resorting to advanced micro-nanoprocessing technologies for production of more functional “lab-on-a-chip” systems. However, two-photon polymerization (TPP), a powerful designable micro-nanofabrication approach, has not been put to use on the exciting field, largely due to the difficulties in forming buried channels. Here, we solve the problem by TPP prototyping of nanoshells, for which the usage of the negative tone resin SU-8 is found critical. The fabrication efficiency improved by orders of magnitude, together with the prospect of integration of movable micro-mechanical and optical components into the chip would make TPP a promising enabling tool for the micro-analytical systems. Finally, a 25 μm length functional microvalve in a microfluidic channel was rapidly realized and its “ON” and “OFF” states were tested.

Graphical abstract: Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices

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Publication details

The article was received on 03 Feb 2009, accepted on 18 May 2009 and first published on 01 Jun 2009


Article type: Technical Note
DOI: 10.1039/B902159K
Citation: Lab Chip, 2009,9, 2391-2394
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    Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices

    D. Wu, Q. Chen, L. Niu, J. Wang, J. Wang, R. Wang, H. Xia and H. Sun, Lab Chip, 2009, 9, 2391
    DOI: 10.1039/B902159K

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