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Three-dimensional fabrication of heterogeneous microstructures using soft membrane deformation and optofluidic maskless lithography

Corresponding authors
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Sillim-dong, Korea
Inter-university Semiconductor Research Center (ISRC), South Korea
Lab Chip, 2009,9, 1670-1675

DOI: 10.1039/B819999J
Received 12 Nov 2008, Accepted 26 Jan 2009
First published online 19 Feb 2009
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