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Three-dimensional fabrication of heterogeneous microstructures using soft membrane deformation and optofluidic maskless lithography

Seung Ah Lee,a   Su Eun Chung,a   Wook Park,a   Sung Hoon Leea and   Sunghoon Kwon*ab  
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School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Sillim-dong, Korea
Inter-university Semiconductor Research Center (ISRC), South Korea
Lab Chip, 2009,9, 1670-1675

DOI: 10.1039/B819999J
Received 12 Nov 2008, Accepted 26 Jan 2009
First published online 19 Feb 2009

This article is part of themed collection: Korean Microfluidics
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