Direct fabrication of 3D silica-like microstructures from epoxy-functionalized polyhedral oligomeric silsesquioxane (POSS)

Jun Hyuk Moon; Jin Seok Seo; Yongan Xu; Shu Yang

doi:10.1039/B901226E

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Journal of Materials Chemistry

Issue 27, 2009

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Direct fabrication of 3D silica-like microstructures from epoxy-functionalized polyhedral oligomeric silsesquioxane (POSS)

Jun Hyuk Moon , Jin Seok Seo , Yongan Xu and Shu Yang

J. Mater. Chem., 2009, 19, 4687-4691

DOI: 10.1039/B901226E
Received 20 Jan 2009, Accepted 14 Apr 2009
First published on the web 23 Apr 2009

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Abstract
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We have fabricated 2D and 3D structured organosilcates from epoxy functionalized polyhedral oligomeric silsesquioxanes (POSS) cage materials using holographic lithography, which can be conveniently converted to silica structures by thermal removal of the organic moieties.

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Thermogravimetric analysis of the epoxy-POSS photoresist inair
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Journal of Materials Chemistry

Direct fabrication of 3D silica-like microstructures from epoxy-functionalized polyhedral oligomeric silsesquioxane (POSS)

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