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Issue 46, 2009
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Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)

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Abstract

Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.

Graphical abstract: Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)

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Publication details

The article was received on 17 Jun 2009, accepted on 28 Sep 2009 and first published on 15 Oct 2009


Article type: Communication
DOI: 10.1039/B911888H
Citation: Chem. Commun., 2009,0, 7140-7142
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    Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)

    X. Liang, M. Yu, J. Li, Y. Jiang and A. W. Weimer, Chem. Commun., 2009, 0, 7140
    DOI: 10.1039/B911888H

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