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Issue 1, 2008
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Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

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Abstract

Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 µm, and lengths up to 3 mm, using SU-8 as the channel structural material.

Graphical abstract: Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

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Publication details

The article was received on 11 Jun 2007, accepted on 18 Oct 2007 and first published on 08 Nov 2007


Article type: Technical Note
DOI: 10.1039/B715917J
Citation: Lab Chip, 2008,8, 173-175
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    Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

    K. P. Nichols, J. C. T. Eijkel and H. J. G. E. Gardeniers, Lab Chip, 2008, 8, 173
    DOI: 10.1039/B715917J

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