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Journal of Materials Chemistry was published between 1991 and 2012. From issue 1, 2013, it was replaced by three new journals: Journal of Materials Chemistry A, B and C
Paper

Novel mixed alkylamido-cyclopentadienyl precursors for ALD of ZrO2 thin films

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Corresponding authors
a
Department of Chemistry, University of Helsinki, P.O. Box 55, University of Helsinki, Finland
E-mail: jaakko.niinisto@helsinki.fi
b
University of Tartu, Institute of Physics, Department of Materials Science, Tähe 4, Estonia
c
Air Liquide Research & Development, 1 Chemin de la Porte des Loges, BP 126, Jouy-en-Josas, France
d
Air Liquide Research & Development, DRTC, 200 GBC Drive, Newark, USA
J. Mater. Chem., 2008,18, 5243-5247

DOI: 10.1039/B810922B
Received 27 Jun 2008, Accepted 21 Aug 2008
First published online 30 Sep 2008
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