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Journal of Materials Chemistry

Journal of Materials Chemistry was published between 1991 and 2012. From issue 1, 2013, it was replaced by three new journals: Journal of Materials Chemistry A, B and C


Deposition of ZrO2 and HfO2 thin films by liquid injection MOCVD and ALD using ansa-metallocene zirconium and hafnium precursors

Corresponding authors
Department of Materials Science and Engineering, University of Liverpool, Liverpool, UK
Department of Chemistry, University of Liverpool, Liverpool, UK
E-mail: hca@liv.ac.uk, tjconsultancy@btconnect.com
Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, UK
Tyndall National Institute, Lee Maltings, Ireland
SAFC Hitech, Power Road, Bromborough, UK
J. Mater. Chem., 2008,18, 4561-4571

DOI: 10.1039/B807205A
Received 28 Apr 2008, Accepted 25 Jun 2008
First published online 20 Aug 2008
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