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Journal of Materials Chemistry was published between 1991 and 2012. From issue 1, 2013, it was replaced by three new journals: Journal of Materials Chemistry A, B and C

The surface chemistry of thin film atomic layer deposition (ALD) processes for electronic device manufacturing

Corresponding authors
Department of Chemistry, University of California, Riverside, USA
J. Mater. Chem., 2008,18, 3521-3526

DOI: 10.1039/B803832E
Received 05 Mar 2008, Accepted 01 May 2008
First published online 17 Jun 2008
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