Publishing: Journals, books and databases
Close Icon
 
Scheduled maintenance upgrade on Thursday 18 February 2016 from 10am to 12noon (GMT)
During this time you may experience an intermittent reduction in performance, with the possibility of our publishing platform services being offline temporarily. If you have any questions please use the feedback button on this page. We apologise for any inconvenience this might cause and thank you for your patience.
Journal of Materials Chemistry was published between 1991 and 2012. From issue 1, 2013, it was replaced by three new journals: Journal of Materials Chemistry A, B and C
Paper

Advanced cyclopentadienyl precursors for atomic layer deposition of ZrO2 thin films

*
Corresponding authors
a
Department of Chemistry, University of Helsinki, University of Helsinki, P.O. Box 55, Finland
E-mail: Jaakko.Niinisto@helsinki.fi
b
University of Tartu, Institute of Experimental Physics and Technology, Tähe 4, Tartu, Estonia
c
Beneq OY, Ensimmäinen savu, Vantaa, Finland
d
Picosun USA, LLC, 719 Griswold Street, Suite 820, Detroit, USA
e
Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, Espoo, Finland
f
Ångström Microstructure Laboratory, Department of Engineering Sciences, Uppsala University, Box 534, Uppsala, Sweden
g
SAFC Hitech, Power Road, Bromborough, Wirral, UK
J. Mater. Chem., 2008,18, 3385-3390

DOI: 10.1039/B802523A
Received 13 Feb 2008, Accepted 06 May 2008
First published online 10 Jun 2008
| | | | | | More
Please wait while Download options loads
 
 
Journal of Materials Chemistry - Information Point