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Journal of Materials Chemistry

Journal of Materials Chemistry was published between 1991 and 2012. From issue 1, 2013, it was replaced by three new journals: Journal of Materials Chemistry A, B and C


Advanced cyclopentadienyl precursors for atomic layer deposition of ZrO2 thin films

Corresponding authors
Department of Chemistry, University of Helsinki, University of Helsinki, P.O. Box 55, Finland
E-mail: Jaakko.Niinisto@helsinki.fi
University of Tartu, Institute of Experimental Physics and Technology, Tähe 4, Tartu, Estonia
Beneq OY, Ensimmäinen savu, Vantaa, Finland
Picosun USA, LLC, 719 Griswold Street, Suite 820, Detroit, USA
Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, Espoo, Finland
Ångström Microstructure Laboratory, Department of Engineering Sciences, Uppsala University, Box 534, Uppsala, Sweden
SAFC Hitech, Power Road, Bromborough, Wirral, UK
J. Mater. Chem., 2008,18, 3385-3390

DOI: 10.1039/B802523A
Received 13 Feb 2008, Accepted 06 May 2008
First published online 10 Jun 2008
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