Journal of Materials Chemistry was published between 1991 and 2012. From issue 1, 2013, it was replaced by three new journals: Journal of Materials Chemistry A, B and C
Impact Factor 6.101
Paper

Advanced cyclopentadienyl precursors for atomic layer deposition of ZrO2 thin films

Show Affiliations
Hide Affiliations
*
Corresponding authors
a
Department of Chemistry, University of Helsinki, University of Helsinki, P.O. Box 55, Finland
E-mail: Jaakko.Niinisto@helsinki.fi
b
University of Tartu, Institute of Experimental Physics and Technology, Tähe 4, Tartu, Estonia
c
Beneq OY, Ensimmäinen savu, Vantaa, Finland
d
Picosun USA, LLC, 719 Griswold Street, Suite 820, Detroit, USA
e
Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, Espoo, Finland
f
Ångström Microstructure Laboratory, Department of Engineering Sciences, Uppsala University, Box 534, Uppsala, Sweden
g
SAFC Hitech, Power Road, Bromborough, Wirral, UK
J. Mater. Chem., 2008,18, 3385-3390

DOI: 10.1039/B802523A
Received 13 Feb 2008, Accepted 06 May 2008
First published online 10 Jun 2008
| | | | | | More
Please wait while Download options loads
Download Citation
 
 
Icon Journal of Materials Chemistry - Information Point