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Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor

Yujun Shi,*a   Xinmao Li,a   Ling Tong,a   Rim Toukabria and   Brett Eustergerlinga  
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Department of Chemistry, University of Calgary, Calgary, Alberta, Canada
E-mail: shiy@ucalgary.ca
Phys. Chem. Chem. Phys., 2008,10, 2543-2551

DOI: 10.1039/B718743B
Received 05 Dec 2007, Accepted 26 Feb 2008
First published online 17 Mar 2008
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