Jump to main content
Jump to site search

Issue 12, 2007
Previous Article Next Article

Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

Author affiliations

Abstract

We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.

Graphical abstract: Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

Back to tab navigation

Publication details

The article was received on 25 Sep 2007, accepted on 05 Oct 2007 and first published on 12 Oct 2007


Article type: Communication
DOI: 10.1039/B714742B
Citation: Lab Chip, 2007,7, 1660-1662
  •   Request permissions

    Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

    U. T. Giang, D. Lee, M. R. King and L. A. DeLouise, Lab Chip, 2007, 7, 1660
    DOI: 10.1039/B714742B

Search articles by author

Spotlight

Advertisements