A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics

Tushar Bansal; Meng-Ping Chang; Michel M. Maharbiz

doi:10.1039/B614419E

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Lab on a Chip

Issue 2, 2007

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A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics

Tushar Bansal , Meng-Ping Chang and Michel M. Maharbiz

Lab Chip, 2007, 7, 164-166

DOI: 10.1039/B614419E
Received 04 Oct 2006, Accepted 24 Nov 2006
First published on the web 05 Dec 2006

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Abstract
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We report a class of ‘wet’ MEMS elastomer–metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.

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Fig. S1-S3; microscopy and electrical setup
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A class of low voltage, elastomer–metal ‘wet’ actuators for use in high-density microfluidics

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