Journal of Materials Chemistry was published between 1991 and 2012. From issue 1, 2013, it was replaced by three new journals: Journal of Materials Chemistry A, B and C
Impact Factor 6.101
Paper

A low valent metalorganic precursor for the growth of tungsten nitride thin films by atomic layer deposition

Show Affiliations
Hide Affiliations
*
Corresponding authors
a
Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, Finland
b
Department of Chemistry, Wayne State University, 5101 Cass Avenue, Detroit, USA
E-mail: chw@chem.wayne.edu
c
Department of Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 University of Helsinki, Finland
d
IMEC, Kapeldreef 75, Belgium
e
Institute for Manufacturing Research, 3123 Engineering, Wayne State University, 5050 Anthony Wayne Drive, Detroit, USA
f
Ångström Microstructure Laboratory, Department of Engineering Sciences, Uppsala University, Sweden
J. Mater. Chem., 2007,17, 1109-1116

DOI: 10.1039/B610873C
Received 28 Jul 2006, Accepted 06 Dec 2006
First published online 02 Jan 2007
| | | | | | More
Please wait while Download options loads
Download Citation
 
 
Icon Journal of Materials Chemistry - Information Point