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Paper

Facile fabrication of microfluidic systems using electron beam lithography

Prashant Mali,a   Aniruddh Sarkar*a and   Rakesh Lala  
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a
Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai 400076, India
E-mail: aniruddh@ee.iitb.ac.in;
Fax: +91-22-25723707 ;
Tel: +91-22-25764481
Lab Chip, 2006,6, 310-315

DOI: 10.1039/B510992B
Received 02 Aug 2005, Accepted 06 Dec 2005
First published online 04 Jan 2006
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