Influence of internal energy and impact angle on the sticking behaviour of reactive radicals in thin a-C:H film growth: a molecular dynamics study

Abstract

In this molecular dynamics study, we investigate the influence of the internal energy and the impact angle on the sticking coefficients of several hydrocarbon radicals on a hydrogenated amorphous carbon surface. The selected radical species and their kinetic energy were determined experimentally. However, no information is available regarding their internal energy, nor on their impact angles. It is shown that the internal energy has a considerable influence on the sticking coefficient, which is dependent on the kind of species. The impact angle, however, is shown to be of minor importance.